双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

Advances of phononics in 2012—2022

Due to its great potential applications in thermal management, heat control, and quantum information, phononics has gained increasing attentions since the first publication in Rev. Mod. Phys. 84 1045 (2012). Many theoretical and experimental progresses have been achieved in the past decade. In this paper, we first give a critical review of the progress in thermal diodes and transistors, especially in classical regime. Then, we give a brief introduction to the new developing research directions such as topological phononics and quantum phononics. In the third part, we discuss the potential applications. Last but not least, we point out the outlook and challenges ahead.     

Review on ionization and quenching mechanisms of Trichel pulse

Trichel pulse is a kind of pulsed mode in negative DC corona discharge, which has attracted significant attention because of its considerable applications in industry. Over eighty years, plenty of effort including simulations and experiments has been spent to reveal the ionization and quenching mechanisms of Trichel pulse. By revisiting and summarizing the basic characteristics and well-accepted ionization and quenching mechanisms, this review provides a basic understanding and the current status of Trichel pulse.     

电机驱动微装配在双光子制备微结构中的应用

对微结构的制作、微装配系统进行了研究. 采用飞秒激光双光子聚合微加工技术制作有底座、精细的三维立体“拱形”微结构, 其高250μm、长300μm、厚50μm. 将此微结构与实验室自主搭建的二维微装配平台相结合, 利用自主编程的人机交互界面驱动步进电机, 远程操控微装配设备; 将荧光闪烁陶瓷粉末装配到微结构中, 对装配后的微结构进行荧光光谱表征发现, 纯荧光粉末和微结构中的荧光粉末的发射光谱在测量误差范围内基本一致, 表明荧光粉末的光学性质未发生改变. 利用该装置可以将各类微纳米级材料和微结构进行装配, 形成含有不同材料的微结构系统.     

Quantized-states-based adaptive control against unknown slippage effects of uncertain mobile robots with input and state quantization

An adaptive tracking design strategy based on quantized state feedback is developed for uncertain nonholonomic mobile robots with unknown wheel slippage effects. All state variables and control torques are assumed to be quantized by the state and input quantizers, respectively, in a network control environment. Thus, the quantized state feedback information is only available for the tracking control design. An approximation-based adaptive controller using quantized states is recursively designed to ensure the robust adaptive tracking against unknown wheel slippage effects where the quantized-states-based adaptive mechanism is derived to compensate for unknown wheel slippage effects, system nonlinearities, and quantization errors. The boundedness of the quantization errors and estimated parameters in the closed-loop system is analyzed by presenting some theoretical lemmas. Based on these lemmas, we prove the uniform ultimate boundedness of closed-loop signals and the convergence of the trajectory tracking error in the presence of wheel slippage effects. Simulations verify the effectiveness of the resulting tracking scheme.     

A Closed‐Loop Control Strategy for Producing Nitrile Rubber of Uniform Chemical Composition in a Semibatch Reactor: A Simulation Study

To improve the quality of industrial nitrile rubbers, the copolymer chemical composition, p_A(t), should ideally be kept constant along the reaction. This work proposes a closed‐loop control strategy for the semibatch operation of the reactor with the aim of regulating p_A(t) within a reduced range of variability. The proposed strategy is evaluated by simulating a mathematical model of the process. To this effect, a simplified mathematical model of the reaction is first derived and then utilized to obtain a suboptimal control law and a soft‐sensor that estimates the polymerization rates. The suboptimal control law is compensated by adding a term proportional to errors in p_A(t). The simulated example considers the production of the low‐composition AJLT grade, with the copolymerization reaction represented by a detailed mathematical model adjusted to an industrial plant. Due to the high performance of the soft‐sensor, the simulation results suggest that the proposed closed‐loop strategy is efficient to adequately regulate p_A(t) in spite of structural and parametric uncertainties, while other quality variables remained practically unaffected.     

Wave-based vibration control of large cable net structures

Large cable net structures have been widely applied in aerospace engineering due to the feature of light-weight, high packaging efficiency, and high thermal stability. Structural vibrations induced by a variety of disturbances are inevitable in the space environment, resulting in the requirement of effective vibration control strategies for large cable net structures. Since the large cable net structures have many closely spaced vibrational modes in the range of low frequencies, traditional modal based control may cause modal truncation and spillover problems. In this paper, a wave-based boundary control strategy is adopted and its effectiveness to control the vibration of cable net structures is investigated, by transfer function analysis and numerical methods. It is found that the structural vibration can be absolutely resisted by applying the wave-based boundary controllers onto all the exterior nodes, when disturbances come from the external boundaries of the cable net. Our results in this paper can provide a theoretical basis for the vibration control of large cable net structures.     

Necessary and Sufficient Conditions for Qualitative Properties of Infinite Dimensional Linear Programming Problems

Necessary and sufficient conditions for qualitative properties of infinite dimensional linear programing problems such as solvability, duality, and complementary slackness conditions are studied in this article. As illustrations for the results, we investigate the parametric version of Gale’s example.